Micron - F1 CVTR 148 ALOX - To install fire protection safeguards on a new cabinet, containing trimethyl aluminum, on tool CVTR148, in Building 1X/Fab 1, in accordance with an approved Alternate Design for TMA quantities exceeding UFC maximum allowable limits. These plans include a VESDA Laser Compact high sensitivity smoke detection panel sampling air from within the new cabinet, an explosion proof, IR/UV flame detector within the cabinet, flow monitoring of the nitrogen fire suppression agent for cabinet flooding, pressure supervision of the nitrogen supply, cabinet exhaust air flow monitoring, and a cabinet door switch interlocked to disable all chemical delivery valves. The existing building FA system will power and monitor the UV/IR smoke detector, monitor the Vesda smoke detection system for supervisory and trouble, release the nitrogen suppression agent and disable chemical gas valves in event of UV/IR flame detection, supervise the nitrogen supply pressure, monitor the tool power supply and release the nitrogen in event of an emergency power off condition. The exhaust airflow switch will be monitored for alarm and trouble at the constantly attended central control room.
There is no associated building permit.